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EL-FLOW®Select - Laboratory style
GAS Mass Flow Meters / Mass Flow Controllers

General

EL-FLOW® Select Series Mass Flow Meters/Controllers are thermal mass flow meters of modular construction with a 'laboratory style' pc-board housing. Control valves can either be integrally or separately mounted, to measure and control gas flows from:

lowest range 0,014...0,7 mln/min
up to highest range 8...1670 ln/min

The control valve design of the mass flow controller distinguishes itself from competitive designs by its truly modular construction and its ability to be field replaced or changed by the user without any adjustment. The standard valve is normally closed and is available up to Kv-values of 1.5. Normally opened valves can also be supplied.

For high (differential) pressure applications, patented constructions enable us to handle high flows and/or pressures at differential pressures up to 400 bar in the EL-FLOW® program, a capability which is unique in the market place. More info about high pressure mass flow meters/controllers.

Digital = Standard

All models of the EL-FLOW Select series are equipped with a digital pc-board, featuring self-diagnostics, alarm and counter functions, digital communication and remotely adjustable control settings. These digital instruments from Bronkhorst High-Tech offer great flexibility thanks to the "multibus" concept, whereby the instruments can be equipped with an on-board interface with DeviceNet™, Profibus-DP®, Modbus, EtherCAT® (MBC3 pcb required) or FLOW-BUS protocol. More information about digital "multibus" communication.

Optional Multi Gas / Multi Range

EL-FLOW Select instruments can be offered with optional Multi Gas / Multi Range (MG/MR) functionality. This option offers greater flexibility for user selection of both flow ranges and gas types, maintaining high accuracy and turndown range for measurement and control. Thanks hereto, users of these instruments can rescale their instruments on site, saving time (and money) for mounting and dismounting. For the convenience of the user, Bronkhorst High-Tech has developed an easy-to-use software tool called "FlowTune" for changing the configuration of Select instruments with activated Multi Fluid / Multi Range option (to be specified at the moment of ordering).

Multi Gas / Multi Range

  • Features
  • Applications
  • Flow capacities
  • Documentation

Features

  • High accuracy (standard 0,5% Rd plus 0,1% FS)
  • Rangeability in digital mode up to 1:187,5
  • Fast response (down to 500 msec), excellent repeatability
  • Optional Multi-Gas / Multi-Range functionality: freely programmable ranges and gas types
  • Pressure ratings 64 / 100 bar (Multi-Gas / Multi-Range functionality up to 10 bar)
  • High pressure versions available
  • Analog I/O-signals, RS232-connection; optional on-board fieldbus interface
  • Electro-chemical polishing of all surfaces
  • Compact, modular construction
  • Metal sealed and/or down-ported versions available

Applications

  • Analytical/environmental equipment
  • Gas flow monitoring in food, chemical and petrochemical industries
  • Gas consumption measurement in gas distribution systems for internal accounting purposes
  • Detection of gas leakage through objects
  • Semiconductor manufacturing
  • Surface treatment installations

Flow capacities (based on air)

Mass Flow Meter (MFM);

PN100 (Pressure rating 100 bar)

Ranges

Series F-110C min. 0,014 ... 0,7 mln/min
max. 0,06 ... 9 mln/min
Series F-111B min. 0,16 ... 8 mln/min
max. 0,16 ... 25 ln/min
Series F-111AC min. 0,4 ... 20 ln/min
max. 0,6 ... 100 ln/min
Series F-112AC min. 0,8 ... 40 ln/min
max. 1,4 ... 250 ln/min
Series F-113AC min. 4 ... 200 ln/min
max. 8 ... 1670 ln/min

Mass Flow Controller (MFC);

PN64 / PN100

Ranges

Series F-200CV / F-210CV 1) min. 0,014 ... 0,7 mln/min
max. 0,06 ... 9 mln/min
Series F-201CV / F-211CV 1)
min. 0,16 ... 8 mln/min
max. 0,16 ... 25 ln/min
Series F-201AV / F-211AV 1) min. 0,4 ... 20 ln/min
max. 0,6 ... 100 ln/min
Series F-202AV / F-212AV 2) min. 0,8 ... 40 ln/min
max. 1,4 ... 250 ln/min
Series F-203AV / F-213AV 2) min. 4 ... 200 ln/min
max. 8 ... 1670 ln/min

1) with small type of valve for normal applications
2) with pilot-operated valve for high flow applications; MG/MR option not yet available for these models

Brochures

For more info see leaflet "EL-FLOW digital thermal mass flow meters/controllers for gases", our leaflet describing the Mass Flow Select series or our EL-FLOW Select datasheets with model specific information.

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Mass Flow Controller - Bronkhorst EL-FLOW model F-201CV

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Mass Flow Meter - Bronkhorst Model F-110C

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Thermal Mass Flow Meter - Bronkhorst model F-112AC

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Mass Flow Controller with Vary-P Valve, PN400 - EL-FLOW F-232M

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Mass Flow Controller for higher gas flow rates - F-203AV

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Massendurchflussregler für Gase - Bronkhorst Modell F-201CV.jpg

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Massendurchflussmesser für Gase - EL-FLOW Modell F-110C

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Durchflussregler für grössere Gasmengen - Modell F-203AV

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