EL-FLOW®Select
- Laboratory style
GAS Mass Flow Meters / Mass Flow Controllers
General
EL-FLOW® Select Series Mass Flow Meters/Controllers are
thermal mass flow meters of modular construction with a 'laboratory style'
pc-board housing. Control valves can either be integrally or separately
mounted, to measure and control gas flows from:
lowest range 0,014...0,7 mln/min
up to highest range 8...1670 ln/min
The control valve design of the mass flow controller distinguishes itself
from competitive designs by its truly modular construction and its ability
to be field replaced or changed by the user without any adjustment. The
standard valve is normally closed and is available up to Kv-values of 1.5.
Normally opened valves can also be supplied.
For high (differential) pressure applications, patented constructions
enable us to handle high flows and/or pressures at differential pressures
up to 400 bar in the EL-FLOW® program, a capability which
is unique in the market place. More
info about high pressure mass flow meters/controllers.
Digital = Standard
All models of the EL-FLOW Select series are equipped with a digital
pc-board, featuring self-diagnostics, alarm and counter functions, digital
communication and remotely adjustable control settings. These digital instruments
from Bronkhorst High-Tech offer great flexibility thanks to the "multibus"
concept, whereby the instruments can be equipped with an on-board interface
with DeviceNet™, Profibus-DP®, Modbus, EtherCAT®
(MBC3 pcb required) or FLOW-BUS protocol. More
information about digital "multibus" communication.
Optional Multi Gas / Multi Range
EL-FLOW Select instruments can be offered with optional Multi
Gas / Multi Range (MG/MR) functionality. This option offers greater
flexibility for user selection of both flow ranges and gas types, maintaining
high accuracy and turndown range for measurement and control. Thanks hereto,
users of these instruments can rescale their instruments on site, saving
time (and money) for mounting and dismounting. For the convenience of the
user, Bronkhorst High-Tech has developed an easy-to-use software tool called
"FlowTune" for changing the configuration of Select instruments with activated
Multi Fluid / Multi Range option (to be specified at the moment of ordering).
Features
Applications
Flow capacities
Documentation
Features
High accuracy (standard 0,5% Rd plus 0,1% FS)
Rangeability in digital mode up to 1:187,5
Fast response (down to 500 msec), excellent repeatability
Optional Multi-Gas / Multi-Range functionality: freely programmable
ranges and gas types
Pressure ratings 64 / 100 bar (Multi-Gas / Multi-Range functionality
up to 10 bar)
Gas flow monitoring in food, chemical and petrochemical industries
Gas consumption measurement in gas distribution systems for internal
accounting purposes
Detection of gas leakage through objects
Semiconductor manufacturing
Surface treatment installations
Flow capacities (based on air)
Mass Flow Meter (MFM);
PN100 (Pressure rating 100 bar)
Ranges
Series F-110C
min. 0,014 ... 0,7 mln/min
max. 0,06 ... 9 mln/min
Series F-111B
min. 0,16 ... 8 mln/min
max. 0,16 ... 25 ln/min
Series F-111AC
min. 0,4 ... 20 ln/min
max. 0,6 ... 100 ln/min
Series F-112AC
min. 0,8 ... 40 ln/min
max. 1,4 ... 250 ln/min
Series F-113AC
min. 4 ... 200 ln/min
max. 8 ... 1670 ln/min
Mass Flow Controller (MFC);
PN64 / PN100
Ranges
Series F-200CV / F-210CV 1)
min. 0,014 ... 0,7 mln/min
max. 0,06 ... 9 mln/min
Series F-201CV / F-211CV 1)
min. 0,16 ... 8 mln/min
max. 0,16 ... 25 ln/min
Series F-201AV / F-211AV 1)
min. 0,4 ... 20 ln/min
max. 0,6 ... 100 ln/min
Series F-202AV / F-212AV 2)
min. 0,8 ... 40 ln/min
max. 1,4 ... 250 ln/min
Series F-203AV / F-213AV 2)
min. 4 ... 200 ln/min
max. 8 ... 1670 ln/min
1) with small type of valve for normal applications 2) with pilot-operated valve for high flow applications; MG/MR
option not yet available for these models