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Pre-installed Gases

MV-301 

MV-302

MV-304

MV-306

MV-308

Air, N2, O2, CO2, CO and N2O 10 .. 200 mln/min 20 .. 2000 mln/min 0.04 .. 20 ln/min 0.4 .. 200 ln/min 1 .. 500 ln/min
Ar not available 40 .. 4000 mln/min 0.08 .. 40 ln/min 0.8 .. 400 ln/min 2 .. 1000 ln/min
CH4, C3H8 and C4H10 not available 10 .. 1000 mln/min 0.02 .. 10 ln/min 0.2 .. 100 ln/min 0.5 .. 250 ln/min

Helium

Flow ranges

MV-391-HE 20 .. 200 mln/min
MV-392-HE 50 .. 2000 mln/min
MV-394-HE 0.1 .. 20 ln/min
MV-396-HE 0.2 .. 100 ln/min

Hydrogen

Flow ranges

MV-391-H2 20 .. 200 mln/min
MV-392-H2 50 .. 1000 mln/min
MV-394-H2 0.1 .. 10 ln/min
MV-396-H2 0.2 .. 100 ln/min
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MASS-VIEW
Mass Flow Meter

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MASS-VIEW
Mass Flow Regulator

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MASS-VIEW
Mass Flow Controller