Mass Flow Meter (MFM)

Ranges

Model D-6310 min. 0.01 ... 0.2 ln/min
max. 0.02 ... 2.0 ln/min
Model D-6320 min. 0.02 ... 1.0 ln/min
max. 0.05 ... 5.0 ln/min
Model D-6340 min. 0.1 ... 5.0 ln/min
max. 0.5 ... 50.0 ln/min
Model D-6360 min. 0.4 ... 20.0 ln/min
max. 2.0 ... 200 ln/min
Model D-6370 min. 2.0 ... 100 ln/min
max. 10.0 ... 1000 ln/min
Model D-6380 min. 10.0 ... 500 ln/min
max. 50.0 ... 5000 ln/min

Mass Flow Controller (MFC)

Ranges

Model D-6311 min. 0.01 ... 0.2 ln/min
max. 0.04 ... 2.0 ln/min
Model D-6321 min. 0.02 ... 1.0 ln/min
max. 0.1 ... 5.0 ln/min
Model D-6341 min. 0.1 ... 5.0 ln/min
max. 1.0 ... 50.0 ln/min
Model D-6361 min. 0.4 ... 20.0 ln/min
max. 4.0 ... 200 ln/min
Model D-6371 min. 2.0 ... 100 ln/min
max. 20.0 ... 1000 ln/min
Model D-6383 min. 10.0 ... 500 ln/min
max. 100 ... 5000 ln/min

data:lang[@id=$lang]/image:description

Winner of Silver Gas Award 2010

data:lang[@id=$lang]/image:description

D-6320 Mass Flow Controller with local display/operation

data:lang[@id=$lang]/image:description

TFT display

data:lang[@id=$lang]/image:description

Mass Flow Controller with display for higher flow rates D-6361-002BI

data:lang[@id=$lang]/image:description